Lambda Physik AG
Lambda Physik AG english

Lambda Physik AG receives funding for 157nm technology Corporate-news announcement sent by DGAP. The sender is solely responsible for the contents of this announcement. ——————————————————————————– Göttingen, September 24, 2002 – Lambda Physik AG (SIN 549 427), one of the world’s leading suppliers of pulsed UV lasers, will invest up to EUR 5 million until 2004 in the development of 157nm laser technology for the production of a new generation of even more powerful microchips. Up to 38 per cent of the development and research expenses required for this project will be funded by the German Federal Ministry of Education and Research (BMBF). The BMBF has approved the funding of the European 157nm microlithography consortion. Consisting of industry partners such as ASML, Carl Zeiss, Jenoptik, Schott and Infineon as well as European universities and research institutions. This initiative is part of the European Medea+ project (FLUOR) on the development of optical lithography. 157nm laser technology will succeed the currently used wavelengths of 248nm and 193nm. 157nm technology is expected to be used for the production of microchips from 2005/2006 and targets structures in the 50 to 70 nanometer range. Lamda Physik has already shipped the first prototypes for the development of 157nm technology in 1999. “In addition to the semiconductor industry, we see interesting applications for 157nm laser technology also in the micromachining and lifesciences area”, comments CEO Dr. Dirk Basting. “We are currently only at the beginning of discovering the whole range of potential applications of this new generation of lasers.” About the company Lambda Physik is one of the pioneers and world leaders in the development and production of pulsed UV lasers such as excimer lasers, diode-pumped solid-state lasers, and dye lasers. Founded in 1971, the company is the sole or leading supplier in growth markets for applications in industry, science, and medicine and has become a major supplier in the area of microlithography. The group has subsidiaries in the USA, Japan and Germany. Further information is available at www.lambdaphysik.com or from: Lambda Physik AG Claudia Thomé Hans-Böckler-Str. 12 37079 Göttingen Tel.: +49 (0)551 6938-113 Fax: +49 (0)551 6938-104 cthome@lambdaphysik.com Haubrok Investor Relations AG Sönke Knop Siesmayerstr. 10 60325 Frankfurt Tel.: +49 (0)69 716786-01 Fax: +49 (0)69 716786-99 S.Knop@haubrok.de end of message, (c)DGAP 24.09.2002 ——————————————————————————– WKN: 549427; ISIN: DE0005494272; Index: Nemax 50 Listed: Neuer Markt in Frankfurt; Freiverkehr in Berlin, Bremen, Düsseldorf, Hamburg, Hannover, München und Stuttgart 240939 Sep 02