Lambda Physik AG
Lambda Physik AG english

Jenoptik AG and Lambda Physik AG receive first order for EUV light sources Corporate-news announcement sent by DGAP. The sender is solely responsible for the contents of this announcement. ——————————————————————————– Jena/Göttingen, September 17, 2002 – The nanotechnology joint venture XTREME technologies GmbH between JENOPTIK AG (SIN 622 910) and Lambda Physik AG (SIN 549 427) received its first order for EUV light sources significantly earlier than originally expected. The customer is the British microstepper manufacturer Exitech Ltd. One of the end customers is International SEMATECH, USA where the microstepper will be used for the development of EUV process technology. The shipment of the extreme ultraviolet (EUV) light sources is scheduled for 2003. Originally, the first sales with EUV light sources were not expected until 2004/2005. The award of the order to XTREME technologies should therefore be viewed as an early technological and economic success of the joint venture. XTREME technologies and Exitech have entered a cooperation for the development of EUV technology for microsteppers. The introduction of EUV technology in the production of increasingly powerful microchips in the semiconductor industry is expected to take place starting 2007. EUV technology is favored as the next generation technology following the excimer laser technology currently used in optical microlithography. The shortest available wavelength in the excimer range, 157nm, will be used in production starting 2005/2006. Currently, wavelengths of 248nm and 193nm are employed in the production of microchips. While 157nm technology is designed for feature sizes of 50 to 70 nanometers, EUV technology will be capable of handling feature sizes of 35 nanometers. “The EUV microstepper is used in the initial test phase of the next generation lithography,” explains Dr. Malcolm Gower, Chairman of Exitech Ltd. in Oxford, UK. “This test phase usually starts as early as three to five years before the actual use in chip production and permits early conclusions regarding the optics, materials, measurement technology, and performance of the future production systems. We have chosen XTREME technologies because they offer the most stable EUV light source with the highest output power worldwide.” “We are very pleased with this early order which reinforces the outstanding technological positioning of our joint venture,” comments Dr. Dirk Basting, CEO of Lambda Physik AG. “In a very short time, XTREME technologies has demonstrated excellent technological performance and has now even received its first order significantly earlier than expected. This confirms that we are on the right track with our investment in the future.” About Exitech Ltd. (www.exitech.co.uk) Exitech Ltd. is a leading supplier of laser microfabrication tools to the semiconductor, microelectronics, display, computer-peripheral, photonics, telecommunications and biomedical industries. Founded in 1984, Exitech was the first company to commercially exploit laser micromachining for industrial applications. Since 1994 Exitech has provided a range of deep-ultraviolet 248nm, 193nm and 157nm microstepper tools to the semiconductor industry and is the supplier of tools currently used by the world’s leading chip manufacturers at the consortia International SEMATECH in Austin, Texas and SELETE in Tskuba, Tokyo. Exitech headquarters are located in Oxford, England with subsidiaries in Foster City, California and Tokyo, Japan. About Jenoptik AG (www.jenoptik.com) JENOPTIK AG (WKN 622910) is a globally active technology group based in Jena, Germany, with concentrations in two high-growth company divisions, Clean Systems Technologies and Photonics Technologies. The company grew out of JENOPTIK Carl Zeiss JENA GmbH in 1991. Since June 1998, JENOPTIK AG has been listed on the Frankfurt Stock Exchange and is included in the M-Dax index. About Lambda Physik AG (www.lambdaphysik.com) Lambda Physik is one of the pioneers and world leaders in the development and production of pulsed UV lasers such as excimer lasers, diode-pumped solid-state lasers, and dye lasers. Founded in 1971, the company is the sole or leading supplier in growth markets for applications in industry, science, and medicine and has become a major supplier in the area of microlithography. The group has subsidiaries in the USA, Japan, and Germany. For additional information please contact: Jenoptik AG Jörg Hettmann Carl-Zeiß-Straße 1 07739 Jena Germany Tel.: +49 (0) 3641 652-255 Fax: +49 (0) 3641 652-484 E-Mail: pr@jenoptik.com Lambda Physik AG Claudia Thomé Hans-Böckler-Str. 12 37079 Göttingen Germany Tel.: +49 (0)551 6938-113 Fax: +49 (0)551 68691 E-Mail: ir@lambdaphysik.com end of message, (c)DGAP 17.09.2002 ——————————————————————————– WKN: 549427; ISIN: DE0005494272; Index: Nemax 50 Listed: Neuer Markt in Frankfurt; Freiverkehr in Berlin, Bremen, Düsseldorf, Hamburg, Hannover, München und Stuttgart 170825 Sep 02